Equipment

Field emission transmission electron microscope (FE-TEM)

・FEI, Tecnai G2F30

Transmission electron microscope (TEM)

・JEOL, JEM-2100

Field emission scanning electron microscope (FE-SEM)

・Hitachi Hi-tech, S-5500

Field emission scanning electron microscope (FE-SEM)

・Hitachi Hi-tech, SU8230

Field emission scanning electron microscope (FE-SEM)

・Hitachi Hi-tech, SU5000

Scanning electron microscope (SEM)

・Vert-me, Tiny SEM M3-i

Digital microscope

・Keyence, VHX-2000

Focused ion beam（FIB）

・Hitachi Hi-tech, FB-2200

3D holder

・Hitachi Hi-tech

TEM-nanoindenter (for JEOL)

・Nanofactory Instruments AB, TEM-nanoindenter

TEM-nanoindenter (for FEI)

・Nanofactory Instruments AB, TEM-nanoindenter

AFM-TEM holder (for JEOL)

・Nanofactory Instruments AB, AFM-TEM holder

Loading device built in TEM holder

・Mel-Bulid

Tension-compression loading device built in TEM holder

・Unisoku

Ar Ion milling system

・Hitachi High-tech, Gentle mill-Hi
　（Linda, Gentle mill）

Ar Ion milling system

・Hitachi High-tech, Gentle mill-Hi
　（Linda, Gentle mill）

Glancing angle deposition system

・Eiko

Ultra-high vacuum furnace

・Eiko

Thermo-hygrostat

・Yamato scientific, IW222

Tension-compression loading device (for SEM)

・Unisoku

Indentation device (for SEM)

・Unisoku

Tensile loading device (for SEM)

・Unisoku

Picoindentor

・Hysitron, PI85

Micromanipulator

・Kleindiek, Micromanipulator

Temperature-controlled four-point bending fatigue testing apparatus

・Unisoku

Wire bonder

・　TPT Japan, HB05

Load testing system

・A&D, MCT2150

Sputtering system

・Eiko IB-3

Semiconductor device parameter analyzer

・Keysight, 4200A-SCS

3D printer

・keyence, AGILISTA

Vacuum furnace

・ULVAC, MILA-3000

Resonant Vibration Fatigue Testing System

・Laser Doppler Displacement Transducer:
　Onosokki, LV-1720
・Function generator:
　NF Corporation, DF1906
・Oscilloscope:
　GW INSTEK GDS-1022
・Control program
　National Instruments, LabView